Rigaku XRF 3630 X-Ray Wafer Analyzer
Rigaku 3630 X-Ray Wafer Analyzer Capable of 4" to 8" Wafers
Continuous rating: max. 60 kV - 100 mA, 3 Kw
Control system: detection on secondary side, control on
primary side.
Stability: within ±0.01% power supply variation ±10%
Maximum sample size: 200 mm
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