System can be set up for 3- 7" Square Mask or 3-8" Round Wafers Ultratech 602 Mask CleanerHandles up to 7" x 7" Mask, system includes one chuck High pressure N2 blowoffHigh pressure water jet for effective cleaningCapability to dispense two solvents or detergentsHigh temp lamp dyerSystem can be set up for 3- 7" Square Mask or 3-8" Round Wafers (customer to specify substrate size)