Ultratech UltraStep 1500 Big Field Projection Stepper, Capability 2" to 8" wafers, Exposes reticule images in a step-and-repeat manner, Cassette to Cassette Load
Ultratech UltraStep 1500 Big Field Projection Stepper, Capability 2" to 8" wafers, Exposes reticule images in a step-and-repeat manner, Cassette to Cassette Load