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Since 1998, SPEC's refurbishment processes
have guaranteed exceptional performance with
the greatest savings.
– John Sardi, President & CEO

About us

The Leading Provider of New and
Remanufactured Semiconductor
Process Equipment

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SPEC Equipment specializes in
GaSonics, KLA-Tencor, SussMicroTec,
and ADE systems, as well as most
front-end process equipment.

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Providing parts, services, upgrades &
new and remanufactured equipment
to companies all over the globe.

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Sell your unused equipment using our
consignment agreement! We can store,
track, refurbish, and sell underutilized or
unwanted tools.

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Ultimate Performance Upgrades

Current L3510 & A1000

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